One-Dimensional Modeling of a Radiofrequency Discharge in an Electropositive Gas at Low Pressure

Abstract

This work presents, through numerical modeling, the fundamental properties of radio frequency electrical discharge type. A one-dimensional (1-D) fluid model, consisting of the first three moments of the Boltzmann equation (equation of continuity, momentum transfer, and electron energy) auto-consistently coupled to the Poisson equation, is used. The discretization of the equations of this model is carried out by the finite difference exponential flux scheme which can take into account the enormous density gradients and inversions of the electric field in the cathode sheath. A study of a radiofrequency discharge is carried out for an electropositive gas (Argon). The 1-D fluid model developed in this study gives a prediction of the electrical characteristics and general properties of radiofrequency electric discharges.